%0 Journal Article %J Optics Express %D 2004 %T Electronic color charts for dielectric films on silicon %A Justin Henrie %A Spencer Kellis %A Stephen Schultz %A Aaron Hawkins %K Color %K measurement %K optical properties %K Thin films %X

This paper presents the calculation of the perceived color of dielectric films on silicon. A procedure is shown for computing the perceived color for an arbitrary light source, light incident angle, and film thickness. The calculated color is converted into {RGB} parameters that can be displayed on a color monitor, resulting in the generation of electronic color charts for dielectric films. This paper shows generated electronic color charts for both silicon dioxide and silicon nitride films on silicon.

%B Optics Express %V 12 %P 1464–1469 %G eng %U http://www.opticsexpress.org/abstract.cfm?URI=oe-12-7-1464 %R 10.1364/OPEX.12.001464