TY - JOUR T1 - Electronic color charts for dielectric films on silicon JF - Optics Express Y1 - 2004 A1 - Justin Henrie A1 - Spencer Kellis A1 - Stephen Schultz A1 - Aaron Hawkins KW - Color KW - measurement KW - optical properties KW - Thin films AB -

This paper presents the calculation of the perceived color of dielectric films on silicon. A procedure is shown for computing the perceived color for an arbitrary light source, light incident angle, and film thickness. The calculated color is converted into {RGB} parameters that can be displayed on a color monitor, resulting in the generation of electronic color charts for dielectric films. This paper shows generated electronic color charts for both silicon dioxide and silicon nitride films on silicon.

VL - 12 UR - http://www.opticsexpress.org/abstract.cfm?URI=oe-12-7-1464 N1 -
KW - Henrie2004 ER -