01055nas a2200133 4500008004100000245008800041210006900129300001200198490000600210520062200216100001700838700001600855856005000871 1964 eng d00aNondestructive determination of thickness and refractive index of transparent films0 aNondestructive determination of thickness and refractive index o a43–510 v83 a
A simple nondestructive method of measuring the refractive index and thickness of transparent films on reflective substrates has been developed. The technique involves the use of a microscope equipped with a monochromatic filter on the objective and a stage that can be rotated so that the reflected light is observed at various angles. The film thickness, d, is given by d = {[ΔNλ]/[2µ(cos} r2, - cos r1)], where λ is the wavelength of the filtered light, µ is the refractive index, and {ΔN} is the number of fringes observed between the angles of refraction r2, and r1.
1 aPliskin, W A1 aConrad, E E uhttp://portal.acm.org/citation.cfm?id=1662391