01116nas a2200205 4500008004100000245006000041210006000101300001600161490000700177520052000184653001000704653001600714653002300730653001500753100001900768700002000787700002100807700001900828856006300847 2004 eng d00aElectronic color charts for dielectric films on silicon0 aElectronic color charts for dielectric films on silicon a1464–14690 v123 a
This paper presents the calculation of the perceived color of dielectric films on silicon. A procedure is shown for computing the perceived color for an arbitrary light source, light incident angle, and film thickness. The calculated color is converted into {RGB} parameters that can be displayed on a color monitor, resulting in the generation of electronic color charts for dielectric films. This paper shows generated electronic color charts for both silicon dioxide and silicon nitride films on silicon.
10aColor10ameasurement10aoptical properties10aThin films1 aHenrie, Justin1 aKellis, Spencer1 aSchultz, Stephen1 aHawkins, Aaron uhttp://www.opticsexpress.org/abstract.cfm?URI=oe-12-7-1464