Resistivity-Dopant Density Relationship for Phosphorus-Doped Silicon

Submitted by drupal on Sat, 04/28/2012 - 22:47

W. R. Thurber, Mattis, R. L., Liu, Y. M., and Filliben, J. J., “Resistivity-Dopant Density Relationship for Phosphorus-Doped Silicon”, Journal of The Electrochemical Society, vol. 127, pp. 1807-1812, 1980.

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