@article {Tsai1969, title = {Shallow phosphorus diffusion profiles in silicon}, journal = {Proceedings of the IEEE}, volume = {57}, year = {1969}, month = {Jan-09-1969}, pages = {1499 - 1506}, issn = {0018-9219}, doi = {10.1109/PROC.1969.7325}, url = {http://ieeexplore.ieee.org/document/1449255/http://xplorestaging.ieee.org/ielx5/5/31124/01449255.pdf?arnumber=1449255} }