@article {Hu1983-2,
	title = {On Phosphorus Diffusion in Silicon},
	journal = {On Phosphorus Diffusion in Silicon},
	volume = {54},
	year = {1983},
	note = {<br />},
	pages = {6912-6922},
	author = {S.M. Hu and P. Fahey and P. Sutton}
}
